Complete repair services for semiconductor robots, prealigner, indexers and tracks.

Semibot offers complete repair services for semiconductor robots, pre-aligners, indexers and tracks, robot arm tooling, including automatic tool changers, multi-axis force/torque sensing systems, robotic deburring tools, robotic collision sensors, rotary joints, and compliance devices.

Semibot refurbishes Equipe/PRI/Brooks, Genmark,MECS and Cybeq as well as other prevalent brands. Semibot has the most experienced technical staff in the semiconductor robot repair industry.

Members of Semibot technical staff are factory trained and have decades of experience. Potential problems are identified before a failure occurs to insure the unit will operate reliably. Units are thoroughly tested. Each subsystem is tested to insure conformation to factory specifications. Units are then run and inspected to verify that units are assembled and configured correctly. A marathon test exercises the robot to further verify the system will run reliably.


Our repair services include

We offer replacement of In addition we offer


  • Full diagnostic on all equipment to pinpoint malfunction
  • Full inspection to determine worn parts and potential failures
  • Only factory specified parts used in repairs
  • 72 hour cycle test on every unit
  • Complete point-by point final quality inspection
  • One year warranty on all services
  • Flex cable replacement
  • Drive belt replacement
  • Solenoid and sensor switch replacement
  • Vacuum tubing replacement
  • Cleaning of all internal parts and drive pulleys
  • Lead-screw and ball-spline cleaning and lubrication
  • Robot axes alignment
  • Sensor functions checking
  • Ball-screw rebuilding


All our services include one year warranty and thorough 72 hour testing and result documentation.