Custom and standard ceramic and aluminum end effectors for the semiconductor, biotechnology, and flat panel display industries.

Custom and standard ceramic and aluminum end effectors for the semiconductor, biotechnology, and flat panel display industries.

  • Non-metallic conductive PEEK, Vespel,® or Quartz contact pad(s) or Ceramic
  • 200mm and 300mm Bridge Tool Compatible with Random Access
  • Stainless Steel Vacuum Channels
  • Standard or custom designs
  • Short Lead-time

Semibot offers the HEH Horseshoe Type and HEB Blade Type Series of end effectors featuring optimized non-metallic pads made from industry accepted materials (PEEK or UHMW standard).

Semibot's PROPRIETARY FLATTENING PROCESS ensures the flatness required for vacuum handling while maintaining the original stiffness in the material. Other flattening processes often adversely affect material integrity ultimately hurting end effectors' stiffness. This can result in missed wafers, vibration, or even wafer damage. Other companies solve this problem by increasing the thickness of the material so that it cannot be used for 200mm random access. Semibot doesn't have this problem, our end effectors can be used in 200mm-300mm bridge tool applications.

 

Semiconductor End Effector Specifications

Feature

Value

 
Wafer Sizes Handled 76mm - 200mm
150mm - 300mm
Custom
 
Shape Horseshoe (HEH Series)
Blade (HEB Series)
 
Thickness 0.120" (standard) or specify  
Full Contact Flatness Better than 0.001"  
Mounting Flexible  
Contact Material PEEK
Vespel
Quartz
Ceramic
UHMW
Anodized Aluminum
Custom
End Effector Material Anodized Aluminum w/PEEK Pads Ceramic
Custom